The precision optics technology sector requires rapid surface figuring technology that is aligned with both financial and environmental sustainability. The Plasma Figuring technology uses a reactive plasma jet to chemically surface figure optics. The plasma jet is powered by a solid-state microwave generator, which operates at less than 25 W average power: utilizing pulse power mode to reduce the plasma temperature. 

The ability to discharge a non-thermal plasma at circa 100 ˚C increases the repeatability of the etched Gaussian trenches and maintains the optical surface finish. Plasma Figuring, operating at atmospheric pressure, is designed to create similar figure correction capabilities as Magneto Rheological Finishing (MRF) and Ion Beam Figuring (IBF). Plasma Figuring can achieve high material removal rates with a small spot size; furthermore, it is a technology that uses no harmful chemicals and emits no pollution. Moreover, plasma technology can make optics clean on the atomic level, which potentially can improve the bonding of optics to coatings and improves the Plasma Figuring process. 

The Satisloh paper presented at the previous Optifab explained the physics and chemistry that underpins this stateof- the-art technology. In this subsequent paper, Corning report figure correction of optical surfaces using the Satisloh Plasma Polisher (SPP). Material removal calculations and rates are presented.

Keywords: Optics, surface figuring, form accuracy, surface finish, plasma, atmospheric pressure, microwave, Satisloh, Corning.